Semiconductor device and burn-in method thereof

ABSTRACT

The semiconductor device includes a circuit, such as, an ECL circuit for comparing input signals with a reference potential determined as a circuit threshold value and outputting an output signal according to the comparison result. The semiconductor device further includes a switching circuit for switching the reference potential level between ordinary operation and burn-in operation of the ECL circuit. The time required for the burn-in operation can be reduced markedly.

This application is a continuation of application Ser. No. 08/212,882, filed Mar. 15, 1994, now abandoned.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device such as an ECL (emmiter coupled logic) circuit and a burn-in method thereof. Here, the burn-in implies an activation of a circuit prior to an actual operation in order to stabilize the circuit characteristics and to find a defective circuit at the initial stage thereof.

2. Description of the Prior Art

The circuit configuration and function of the ECL circuit will be described first, that is an example for which a conventional burn-in method has been applied and the burn-in method of the present invention will be applied.

FIG. 16 shows an example of the ECL circuit. In this ECL circuit provided with an OR/NOR gate for three inputs A, B and C, when any one of the three inputs A, B and C becomes high beyond a reference potential V_(ref1) (determined as a circuit threshold value), only one transistor (whose input is high) of three transistors Q7_(a), Q7_(b) and Q7_(c) is turned on and the remaining other transistors and a transistor Q6 are all turned off, so that a current I_(CS) of a constant current source 60 flows through only one current path (the turned-on transistor) of three current paths P1, P2 and P3. Therefore, a potential at a node N2 becomes higher than that at a node /NZ, so that an output Z of the ECL circuit changes to an "H" (High) level by an emitter follower output stage composed of a transistor Q5_(a) and a resistor R_(a2), and another output /Z of the ECL circuit changes to an "L" (Low) level by another emitter follower output stage composed of a transistor Q5_(b) and a resistor R_(b2).

On the other hand, when all the three inputs A, B and C are low below the reference potential V_(ref1), the transistors Q7_(a), Q7_(b) and Q7_(c) are turned off and the transistor Q6 is turned on, so that the current I_(CS) of the constant current source 60 flows through the current path P4. Therefore, a potential at the node NZ becomes lower than that at the node /NZ, so that the output Z of the ECL circuit changes to the "L" level by the above-mentioned emitter follower output stage, and the other output /Z of the ECL circuit changes to the "H" level by the other emitter follower output stage. As described above, a logical sum (=A+B+C) of three inputs A, B and C can be outputted from the output Z of the ECL circuit, and a NOT logical sum (=/(A+B+C)) of three inputs A, B and C a can be outputted from the output /Z of the ECL circuit. Further, in the above-mentioned ECL circuit, the reference potential V_(ref1) is set to an intermediate level (e.g., V_(IM1) =(V_(IH1) +V_(IL1))/2) between the "H" level (e.g., V_(IH1) =-0.8 V) of the input signals A, B and C and the "L" level (e.g., V_(IL1) =-1.4 V) thereof, as shown in FIG, 17.

Further, FIG. 18 shows another example of the ECL circuit. This ECL circuit is a two-input multiplexer for passing any one of two inputs A and B through an output Z on the basis of a select signal S. This ECL circuit requires two reference potentials V_(ref1) and V_(ref2). FIG. 19 shows the relationship among the two reference potentials V_(ref1) and V_(ref2) and two "H" levels (_(IH1), V_(IH2)) and two "L" levels (V_(IL1), V_(IL2)) of two input signals A and B. In more detail, the reference potential V_(ref1) is an intermediate level between V_(IH1) and V_(IL1) and the reference potential V_(ref2) is an intermediate level between V_(IH2) and V_(IL2), respectively. Here, V_(IH2) =V_(IH1) =Φ and V_(IL2) =V_(IL1) -Φ, respectively, where -Φ a V_(BE) of a base-emitter voltage is equal to bipolar transistor (0.8 V, in general).

FIG. 20 shows a bathtub-like curve which represents the change in failure rate of the ECL circuit with the lapse of time. In this bathtub-like characteristic curve, the failure rate can be classified into three periods of initial failure period, accidental failure period and wear-out failure period with the lapse of time. In the initial failure period, the failure due to a design miss or process defects existing in the circuit potentially is actualized at the start of use of the circuit. In the accidental failure period, various failures of the composing elements (which are not actualized in the initial failure period) are actualized in combination at roughly a constant failure rate. In the wear-out failure period, the failure rate due to aged composing elements rises with the lapse of time.

In order to reduce the defective product rate below a constant specified level after the products have been shipped, it is necessary for the maker to stabilize the failure rate at a low level. This process is referred to as a burn-in process. In the base of the burn-in process of the integrated circuit in general, non-defective chips classified according to functions are sealed into packages, and further activated by inputting various test patterns which can realize various actual circuit operation as much as possible so that the failure factors related to the initial defectiveness can be actualized. In the cases of the ECL circuits as shown in FIGS. 16 and 18, for instance, the input signals (test patterns) are switched so that current can be passed through the respective current paths P1, P2, P3 and P4, respectively, in order that the defectiveness factors potentially existing in the respective current paths can be actualized.

A conventional burn-in method will be described herein below with reference to FIG. 16. The four test patterns shown in Table 1 will be applied to the input terminals A, B and C for the burn-in process to make currents pass through the respective current paths P1, P2, P3 and P4 of the OR gate for three inputs of the ECL circuit shown in FIG. 16.

                  TABLE 1                                                          ______________________________________                                         POTENTIAL OF TERMINAL                                                          A      B            C        CURRENT PATH                                      ______________________________________                                         H      L            L        P1                                                L      H            L        P2                                                L      L            H        P3                                                L      L            L        P4                                                ______________________________________                                    

However, in the case of the integrated circuit (IC) device in which a plurality of ECL circuits are connected to each other, extensive and bulky test patterns must be inputted to the device via a large number of input terminals to make currents pass through all of the circuit elements of the device.

For example, in the case of the circuit shown in FIG. 21 which is composed by connecting two of the OR gates of FIG. 16 in series, six test patterns as shown in TABLE 2 must be inputted to the input terminals A1, B1 and C1 of the first OR gate OR1 and the terminals B2 and C2 of the second OR gate for burn-in process.

                  TABLE 2                                                          ______________________________________                                         POTENTIAL OF TERMINAL CURRENT PATH                                             A1    B1      C1      B2    C2    OR1     OR2                                  ______________________________________                                         H     L       L       L     L     P1      P1                                   L     H       L       L     L     P2      P1                                   L     L       H       L     L     P3      P1                                   L     L       L       H     L     P4      P2                                   L     L       L       L     H     P4      P3                                   L     L       L       L     L     P4      P4                                   ______________________________________                                    

A recent general-scale integrated circuit (LSI) device in general is provided with hundreds of input terminals. The number of test patterns for the burn-in process to the LSI device is in the range of thousands and ten thousands steps and the time required for the process per chip of the LSI device is in the range of several hours and tens of hours.

Since hundreds of chips are generally arranged on a wafer, when it takes one hour for the burn-in process per chip, it will take about a thousand hours (about 42 days) per wafer and this is unpractical.

For that reason, conventionally, after each chip is sealed into a package, a large number of packages are mounted on a burn-in board and simultaneously brought into under the burn-in process.

In the conventional burn-in method described above, however, there exist the following problems:

(1) As described above, after each chip is sealed into a package, the burn-in process is performed because it takes time to perform the process to a wafer. Since the sealing of the chips into packages is relative costly, when the chips are determined to be defective in the burn-in process, the package cost becomes wasteful. This will be the cause of a big problem because ECL circuits are mostly sealed into expensive packages for aiming at high performance.

(2) Various burn-in boards must be prepared according to each product or each package.

(3) Since various test patterns must be inputted to a large number of input terminals, relatively expensive pulse generators are required in the burn-in process.

(4) Extensive and bulky test patterns must be inputted into all of circuits elements of a chip in order to pass current there through and to check the defective factors. Relatively longer hours are thus required for the burn-in process.

The above-mentioned problems have become serious more and more with the recent advance of the diversification of the chip (package), the increasing number of the pins, the decreasing delivery lead time, etc.

SUMMARY OF THE INVENTION

With these problems in mind, therefore, it is the object of the present invention to provide a semiconductor device and a burn-in method thereof, which can shorten the time required for the burn-in process of the ECL circuits as much as possible.

To achieve the above-mentioned object, a first aspect of the present invention provides a burn-in method for a semiconductor device which compares an input signal potential with a reference potential to output an output signal according to the comparison result.

The method comprises the step of setting the reference potential to a level higher than a maximum level or lower than a minimum level of the input signal potential.

Further, a second aspect of the present invention provides a burn-in method for a semiconductor device which compares an input signal potential with a reference potential to output an output signal according to the comparison result.

The method comprises the step of setting the input signal potential to an intermediate level between a maximum level and a minimum level of the input signal potential; and setting the reference potential to a level higher than or lower than the input signal potential determined as the intermediate level.

Further, a third aspect of the present invention provides a semiconductor device which compares an input signal potential with a reference potential to output an output signal according to the comparison result in ordinary operation.

The semiconductor device comprises switching means for switching the reference potential level between the ordinary operation and burn-in operation.

In the semiconductor device, the switching means sets the reference potential to a level higher than a maximum level or lower than a minimum level of the input signal potential.

The semiconductor device further comprises setting means for setting the input signal potential to an intermediate level between a maximum level and a minimum level of the input signal potential and the switching means sets the reference potential to a level higher than or lower than the input signal potential determined as the intermediate level.

The semiconductor device further comprises a plurality of signal output circuits connected together, each of which has a differential circuit, the signal output circuit comparing an input signal potential applied to the differential circuit with a reference potential to output an output signal according to the comparison results and the setting means sets an input signal potential, to be applied to a post-stage signal output circuit, to the intermediate level by shorting complementary output modes of the differential circuit.

According to the first aspect (the burn-in method) of the present invention, the reference potential is set to a level higher than or lower than a level of an input signal potential to be applied to a semiconductor device. It is thus possible to employ the reference potential which is higher or lower than the input signal potential as a test pattern for the burn-in operation.

According to the second aspect (the burn-in method) of the present invention, the input signal potential is set to its intermediate level and the reference potential to a level higher or lower than the intermediate level. It is also possible to employ the reference potential which is higher or lower than the input signal potential as a test pattern for the burn-in operation.

According to the third aspect (the semiconductor device) of the present invention, the reference potential level is switched between the ordinary operation and the burn-in operation. It is possible to switch the current paths of the semiconductor device, so that it is possible to shorten the time required for the burn-in operation.

According to the semiconductor device, the input signal potential is set to its intermediate level and the reference potential to a level higher or lower than the intermediate level. It is also possible to switch the current paths of the semiconductor device, so that it is possible to shorten the time required for the burn-in operation.

According to the semiconductor device comprising a plurality of signal output circuits connected together, by shorting complementary output nodes of the differential circuit of a pre-stage signal output circuit, its output signal potential, that is an input signal of a post-stage signal output circuit, is set to its intermediate level and the reference potential level is further set to a level higher or lower than the intermediate level, so that the reference potential is switched between the ordinary operation and the burn-in operation. It is thus possible to switch the current paths of signal output circuits connected together, so that it is possible to shorten the time required for the burn-in operation.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are circuit diagrams for assistance in explaining a concept of a first embodiment of a third aspect of the present invention.

FIG. 2 is a circuit diagram showing a practical reference potential generating circuit to which the concept shown in FIGS. 1A and 1B is applied;

FIGS. 3A and 3B are circuit diagrams for assistance in explaining a modification of the first embodiment of the third aspect of the present invention;

FIGS. 4A and 4B are circuit diagrams for assistance in explaining a concept of a second embodiment of the third aspect of the present invention;

FIG. 5 is a circuit diagram showing a practical reference potential generating circuit to which the concept shown in FIGS. 4A and 4B is applied;

FIGS. 6A and 6B are circuit diagrams showing a modification of the second embodiment of the third aspect of the present invention;

FIGS. 7A and 7B are circuit diagrams for assistance in explaining a concept of a third embodiment of the third aspect of the present invention;

FIG. 8 is a circuit diagram showing a practical reference potential generating circuit to which the concept shown in FIGS. 7A and 7B is applied;

FIG. 9 is a circuit diagram showing a practical example of shorting means of a fourth aspect of the present invention;

FIG. 10 is an illustrating for assistance in explaining the reference potential levels of a first embodiment of a first aspect of the burn-in method according to the present invention;

FIG. 11 is an illustration for assistance in explaining the reference potential levels of a second embodiment of the first aspect of the burn-in method according to the present invention;

FIG. 12 is an illustration for assistance in explaining the reference potential levels of a first embodiment of a second aspect of the burn-in method according to the present invention;

FIG. 13 is an illustrating for assistance in explaining the reference potential levels of a second embodiment of the second aspect of the burn-in method according to the present invention;

FIGS. 14A and 14B are circuit diagrams for assistance in explaining the concept of the reference potential generating circuit;

FIG. 15 is a circuit diagram showing a practical example of the reference potential generating circuit;

FIG. 16 is a circuit diagram showing an example of the ECL circuit;

FIG. 17 is an illustration for assistance in explaining the reference potential level of the ECL circuit shown in FIG. 16;

FIG. 18 is a circuit diagram showing another example of the ECL circuit;

FIG. 19 is an illustration for assistance in explaining the reference potential levels of the ECL circuit shown in FIG. 18;

FIG. 20 is a graphical representation showing the change in failure rate of the ECL circuit with the lapse of time.

FIG. 21 is a circuit diagram showing a practical example of a circuit in which two OR gates for three inputs according to the ECL circuit shown in FIG. 16;

FIG. 22 is a circuit diagram showing a practical example of a circuit in which a counter and inverters are provided in front of the circuit shown in FIG. 21;

FIG. 23 is a timing chart for assistance in explaining the function of the circuit shown in FIG. 22; and

FIG. 24 is a block diagram showing an example of the arrangement in which a large number of ECL circuits are arranged on a semiconductor substrate.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

A first embodiment of a first aspect of the present invention will be described hereinbelow with reference to FIGS. 10 and 16. The burn-in method of this embodiment is adopted for the ECL circuit as shown in FIG. 16, in which there is only one reference potential V_(ref1) (determined as a threshold value of the circuit) used in the circuit. That is, in the burn-in process, the reference potential V_(ref1) is determined to be higher than an "H" level V_(IH1) or lower than an "L" level V_(IL1) of the three input signals A, B and C, in order to switch simultaneously the current paths of the respective gates of the ECL circuit. For instance, the "H" level V_(ref1) (H) and the "L" level V_(ref1) (L) of the reference potential V_(ref1) are determined so as to satisfy the following conditions: V_(ref1) (H)>V_(IH1), and V_(ref1) (L)<V_(IL1), as shown in FIG. 10. Further, in the ordinary operation other than the burn-in operation, as shown in FIG. 17, the reference potential V_(ref) 1 is determined at an intermediate level V_(IM1) between the "H" level V_(IH1) and the "L" level V_(IL1) of the three input signals A, B and C.

When the reference potential V_(ref1) is set to the "H" level V_(ref1) (H) in the burn-in operation, since the potential levels of the three input signals A, B and C of the ECL circuit shown in FIG. 16 are lower than V_(ref1), the current I_(CS) of the constant current source 60 flows through the path P4. Further, when the reference potential V_(ref1) is set to the "L" level V_(ref1) (L) in the burn-in operation, the current I_(CS) of the constant current source 60 flows through only the path of the transistor to which the input signal of "H" level V_(IH1) (H) is applied among the three input signals A, B and C. For instance, if the input signals A and B are at the V_(IH1) and the input signal C is at the V_(IL1), current flows through two paths P1 and P2. Under these conditions, in the ECL circuit shown in FIG. 16, since the potential at the node NC is at V_(IH1) -Φ where Φ denotes V_(BE) (about 0.8 V in general) of a bipolar transistor 0.8 V), the base-emitter voltage V_(BE) of the transistor Q_(7C) to which the input signal C is applied is as

    V.sub.BE =V.sub.IL1 -(V.sub.IH1 -Φ)=Φ-(V.sub.IH1 -V.sub.IL1)<Φ

so that the transistor Q7_(C) is turned off and no current flows through the path P3.

As described above, when the reference potential V_(ref1) is set to the "H" level V_(ref1) (H) or the "L" level V_(ref1) (L), the current paths of the ECL circuit shown in FIG. 16 can be switched as listed in Table 3 below:

                  TABLE 3                                                          ______________________________________                                         POTENTIAL OF V.sub.refl                                                                           CURRENT PATH                                                ______________________________________                                         V.sub.ref1 (L)     ANY OF P1, P2 and P3                                        V.sub.ref1 (H)     P4                                                          ______________________________________                                    

As described above, in the burn-in operation of the present embodiment, it is possible to switch the current paths by only setting the level of the reference potential V_(ref1) to the "H" level V_(ref1) (H) or the "L" level V_(ref1) (L), so that the time required for the burn-in operation can be reduced markedly, as compared with the conventional burn-in operation (Table 1).

Further, the burn-in operation of the first embodiment can be applied to an IC device in which are large number of ECL circuits of FIG. 16 are connected together. In this case, since a reference potential V_(ref) is shared by all of the ECL circuits of the IC device, it is possible to simultaneously switch current paths of all of the ECL circuits, so that the time required for the burn-in operation can be reduced markedly.

A second embodiment of the first aspect of the present invention will be described hereinbelow with reference to FIGS. 11 and 18. The burn-in method of this embodiment is adopted for the ECL circuit as shown in FIG. 18, in which the number of the reference potentials used in the circuit are two. That is, in the burn-in process, the reference potentials V_(ref1) and V_(ref2) are determined to be higher than the "H" level V_(IH1) and V_(IH2) or lower than the "L" level V_(IL1) and V_(IL2) of the two input signals A and B, in order to switch simultaneously the current paths of the respective gates of the ECL circuit, irrespective of the levels of the input signals A and B. For instance, the "H" levels V_(ref1) (H) and V_(ref2) (H) and the "L" levels V_(ref1) (L) and V_(ref3) (L) of the reference potentials V_(ref1) and V_(ref2) are determined so as to satisfy the following conditions: V_(ref1) (H)>V_(IH1) ; V_(ref1) (L)<V_(IL1) ; and V_(ref2) (H)>V_(IH2) ; V_(ref2) (L)<V_(IL2) as shown in FIG. 11. Further, in the ordinary operation other than the burn-in operation, as shown in FIG. 19, the reference potentials V_(ref1) and V_(ref2) are determined at an intermediate level V_(IM1) between the "H" level V_(IH1) and the "L" level V_(IL1) and another intermediate level V_(IM2) between the "H" level V_(IH2) and the "L" level V_(IL2), respectively.

When the reference potentials V_(ref1) and V_(ref2) are set to the "H" levels V_(ref1) (H) and V_(ref2) (H) or the "L" levels V_(ref1) (L) and V_(ref2) (L) in the burn-in operation, the current paths of the ECL circuit shown in FIG. 18 can be switched as listed in Table 4 below:

                  TABLE 4                                                          ______________________________________                                         POTENTIAL OF                                                                               POTENTIAL OF                                                       V.sub.ref2  V.sub.ref1     CURRENT PATH                                        ______________________________________                                         V.sub.ref2 (L)                                                                             V.sub.ref1 (L) P1                                                  V.sub.ref2 (L)                                                                             V.sub.ref1 (H) P2                                                  V.sub.ref2 (H)                                                                             V.sub.ref1 (L) P3                                                  V.sub.ref2 (H)                                                                             V.sub.ref1 (H) P4                                                  ______________________________________                                    

As described above, in the burn-in method of the second embodiment, it is possible to switch the current paths by only setting the levels of the reference potentials V_(ref1) and V_(ref2) to the "H" levels V_(ref1) (H) and V_(ref2) (H) or the "L" levels V_(ref1) (L) and V_(ref2) (L), so that the time required for the burn-in operation can be reduced markedly.

Further, the same as the first embodiment, the burn-in operation of the second embodiment can be applied to an IC device in which a large number of ECL circuits of FIG. 16 are connected together. In this case, since reference potentials V_(ref) are shared by all of the ECL circuits of the IC device, it is possible to simultaneously switch current paths of all of the ECL circuits, so that the time required for the burn-in operation can be reduced markedly.

Further, in the above-mentioned first embodiment, all the paths cannot be switched freely. For instance, one of the paths (connected to the input transistors Q7_(a), Q7_(b) and Q7_(c)) through which current flows is determined by the input signals A, B and C. Therefore, the test patterns for inputting the signals are still required in order to pass current through all the paths.

In addition, the above-mentioned second embodiment is restricted as follows: there exists the case where it is impossible to obtain V_(ref1) =V_(ref1) (L) and V_(ref2) =V_(ref2) (H). For instance, in the case where V_(ref1) (L)=-1.7 V and V_(ref2) (H)=-1.3 V in FIG. 18, the potential at the node N1 is V_(ref1) (L)-Φ=-1.7 V-0.8 V=-2.5 V. Therefore, since the collector potential of the bipolar transistor Q15 to which V_(ref2) is inputted is -2.5 V and the base potential thereof is V_(ref2) (H) =-1.3 V, V_(BC) =-1.3 V-(-2.5 V)=1.2 V>Φ, so that the direction in potential difference between the base and collector of the transistor Q15 is set to the forward direction (turn-on direction). As a result, current flows from the base to the collector and further through the substrate as a substrate current, thus causing a problem in that the transistor is latched up. In order to prevent the direction in potential difference between the base and the collector of the transistor Q15 from being set to the forward direction, the following conditions are necessary: V_(BE) =V_(ref2) (H)-(V_(ref1) (L)-Φ)<Φ; that is, V_(ref1) (L)>V_(ref2) (H). In order to satisfy the conditions that V_(ref1) (L)>V_(IH1) and V_(ref2) (H)>V_(IH2) including the noise margin under the above-mentioned restriction, the necessary conditions are to set the logical amplitudes V_(IH1) -V_(IL1), and V_(IH2) -V_(IL2) of the gate of the ECL circuit to be fairly small values, as compared with Φ. If not so, it is impossible to obtain the setting of V_(ref1) =V_(ref1) (L) and V_(ref2) =V_(ref2) (H) in Table 2, so that current cannot be passed through the path P3.

A first embodiment of a second aspect of the burn-in method according to the present invention will be described hereinbelow with reference to FIGS. 12 and 16. The burn-in method of this embodiment is applied to the case in which a plurality of the ECL circuits as shown in FIG. 16 are connected together. In the burn-in process, the complementary outputs (e.g., the nodes NZ and /NZ) of the differential switch stage of all the ECL circuits are shorted, and further the reference potential V_(ref1) is set to the "H" level V_(ref1) (H) or the "L" level V_(ref1) (L). Here, the level values V_(ref1) (H) and V_(ref1) (L) must satisfy the following conditions as shown in FIG. 12:

    V.sub.ref1 (H)>V.sub.IM1 >V.sub.ref1 (L)

where V_(IM1) is an intermediate level between the "H" level V_(IH1) and the "L" level V_(IL1). Further, in the ordinary operation, the reference potential V_(ref1) is set to an intermediate level V_(IM1) between the "H" level V_(IH1) and the "L" level V_(IL1) of the input signal, as shown in FIG. 17.

When the complementary outputs of the differential switch stage of all the ECL circuits are shorted, the output potentials of all the ECL circuits are set to an intermediate level V_(IM1) between the "H" level V_(IH1) and the "L" level V_(IL1), so that the potentials of the inputs A, B and C of all the gates are set to an intermediate level V_(IM1) between the "H" level V_(IH1) and the "L" level V_(IL1), respectively. Here, if the reference potential V_(ref1) is set to the "H" level V_(ref1) (H), since all the potentials of the three input signals A, B and C as shown in FIG. 16 are lower than the reference potential V_(ref1) due to the fact that output signals of a pre-stage ECL circuit are inputted as the input signals A, B and C, current flows through the path P4. On the other hand, if the reference potential V_(ref1) is set to the "L" level V_(ref1) (L), since all the potentials V_(IM1) of the three input signals, A, B and C are higher than the reference potential V_(ref1) and further equal to each other, current flows through the paths P1, P2 and P3 uniformly.

As described above, after the complementary output nodes NZ and /NZ of the differential switch stage of all the ECL circuits have been shorted, it is possible to switch the current paths of the gates of the ECL circuit as shown in FIG. 16 by setting the reference potential V_(ref1) to the "H" level V_(ref1) (H) or the "L" level V_(ref1) (L), as listed in Table 5 below.

                  TABLE 5                                                          ______________________________________                                         POTENTIAL OF V.sub.ref1                                                                           CURRENT PATH                                                ______________________________________                                         V.sub.ref1 (L)     P1, P2, P3 (UNIFORM)                                        V.sub.ref1 (H)     P4                                                          ______________________________________                                    

As described above, it is possible to reduce the time required for the burn-in operation markedly according to the present embodiment. In addition, since not test pattern like in the conventional method is required, the burn-in operation can be effected to some extent on the wafer, with the result that is possible to eliminate the expensive process of packaging the chips and the use of expensive pulse generators for inputting the test patterns.

A second embodiment of the second aspect of the burn-in method according to the present invention will be described hereinbelow with reference to FIGS. 13 and 18. The burn-in method of this embodiment is applied to the case in which a plurality of the ECL circuits as shown in FIG. 18 are connected together. In the burn-in process, the complementary outputs (e.g., the nodes NZ and /NZ) of the differential switch stage of all the ECL circuits are shorted, and further the reference potentials V_(ref1) and V_(ref2) are set to the "H" levels V_(ref1) (H) and V_(ref2) (H) or the "L" levels V_(ref1) (L) and V_(ref2) (L), respectively. Here, the level values V_(ref1) (H) and V_(ref1) (L) and V_(ref2) (H) and V_(ref2) (L) must satisfy the following conditions as shown in FIG. 13:

    V.sub.ref1 (H)>V.sub.IM1 >V.sub.ref1 (L)

and

    V.sub.ref2 (H)>V.sub.IM2 >V.sub.ref2 (L)

where V_(IM1) and V_(IM2) are an intermediate level between the "H" level V_(IH1) and the "L" level V_(IL1) and another intermediate level between the "H" levels V_(IH2) and the "L" level V_(IL2), respectively. Further, in the ordinary operation, the reference potentials V_(ref1) and V_(ref2) are set to the intermediate levels V_(IM1) and V_(IM2), respectively, as shown in FIG. 19.

After the complementary output nodes NZ and /NZ of the differential switch stage of all the ECL circuits have been shorted. It is possible to switch the current paths of the gates of the ECL circuit as shown in FIG. 18 by setting the reference potential V_(ref1) to the "H" level V_(ref1) (H) or the "L" level V_(ref1) (L) and the reference potential V_(ref2) to the "H" level V_(ref2) (H) or the "L" level V_(ref2) (L) respectively, as listed in Table 6 below.

                  TABLE 6                                                          ______________________________________                                         POTENTIAL OF                                                                               POTENTIAL OF                                                       V.sub.ref2  V.sub.ref1     CURRENT PATH                                        ______________________________________                                         V.sub.ref2 (L)                                                                             V.sub.ref1 (L) P1                                                  V.sub.ref2 (L)                                                                             V.sub.ref1 (H) P2                                                  V.sub.ref2 (H)                                                                             V.sub.ref1 (L) P3                                                  V.sub.ref2 (H)                                                                             V.sub.ref1 (H) P4                                                  ______________________________________                                    

As described above, in this second embodiment, it is possible to obtain the same effect as with the case of the first embodiment.

A third aspect of the semiconductor device including a circuit, such as an ECL circuit, and a reference potential control circuit which conducts the burn-in operation will be described. Prior to the description of the semiconductor device, a reference potential generating circuit for generating a reference potential of the ECL circuit will be first described hereinbelow. The reference potential generating circuit is configured in general, as shown in FIGS. 14A and 14B, respectively. The reference potential generating circuit shown in FIG. 14A includes a load resistor R grounded at one end thereof, a current source 4 connected to the other end of the load resistor R, and an npn type bipolar transistor Q1 having a base connected to the other end of the resistor R and a collector grounded. A reference potential V_(ref) is generated from an emitter of the transistor Q1. In the case of the reference potential generating circuit shown in FIG. 14B, the transistor Q1 of the reference potential generating circuit shown in FIG. 14A is omitted and the reference potential V_(ref) is taken out of a junction point between the load resistor R and the current source 4.

In the above-mentioned reference potential generating circuits as shown in FIGS. 14A and 14B, the reference potential is usually generated on the basis of a constant potential obtained by a band gap reference circuit, as shown in FIG. 15. In FIG. 15, a constant potential V_(M) generated by a master bias circuit 40 based upon a Widlar's band gap reference circuit (referred to as BGR circuit, hereinafter) is transmitted to a slave bias circuit 42. On the basis of this constant potential V_(M), the slave bias circuit 42 generates three reference potentials V_(ref1), V_(ref2) and V_(ref3). The generated three reference potentials V_(ref1), V_(ref2) and V_(ref3) are transmitted to an ECL circuit 44. The load resistor R of the slave bias circuit 42 corresponds to the resistor R of the circuit shown in FIG. 14A, and the reference potential V_(CS), the transistor Q_(B) and the load resistor R_(B) of the slave bias circuit 42 correspond to the constant current source 4 of the circuit shown in FIG. 14A, respectively.

In a third aspect of the semiconductor device including a reference potential control circuit according to the present invention, the reference potential level V_(ref) generated by the reference potential generating circuit is switched between the ordinary operation and the burn-in operation. A first embodiment of the third aspect of the semiconductor device including the reference potential control circuit according to the present invention will be described hereinbelow with reference to the attached drawings. The concept of the first embodiment is describe with reference to FIGS. 1A and 1B, in which the reference potential V_(ref) is directly controlled by applying an input voltage V_(IN) from the outside to a pad 2 connected to one end of the load resistor R of each of the reference potential generating circuits shown in FIGS. 14A and 14B, respectively.

In the ordinary operation, the input voltage V_(IN) is set to the ground level by connecting the pad 2 to a terminal pin to which a signal of ground level is input. In the burn-in operation, however, the input voltage V_(IN) is set to V_(ref) (H)-V_(IM) or V_(ref) (L)-V_(IM). Then, the reference potential V_(ref) in the ordinary operation is

    V.sub.ref =V.sub.IM

and the reference potential V_(ref) in the burn-in operation is

    V.sub.ref =V.sub.IN +V.sub.IM =V.sub.ref (H)

or

    V.sub.ref =V.sub.IN +V.sub.IM =V.sub.ref (L)

Here, when the resistance of the load resistor is denoted by R; the constant current of the constant current source 4 is denoted by I_(B) ; and V_(BE) of the transistor Q1 is denoted by Φ, the V_(IM) is

    V.sub.IM =-(I.sub.B ·R+Φ)

in the burn-in device shown in FIG. 1A and

    V.sub.IM =-I.sub.B ·R

in the burn-in device shown in FIG. 1B.

Here, the V_(ref) (H) or the V_(ref) (L) denotes a desired "H" level or a desired "L" level of the reference potential V_(ref).

FIG. 2 shows a circuit configuration, in which the concept shown in FIGS. 1A and 1B are applied to the practical reference potential generating circuit shown in FIG. 15. In FIG. 2, one end of the load resistor of the slave bias circuit 42 is connected to a pad 2.

As described above, it is possible to switch the reference potential V_(ref) between the ordinary operation and the burn-in operation by connecting one end of the load resistor of the reference potential generating circuit to the pad 2 and further by applying an appropriate input voltage V_(IN) from the outside. In addition, since any desired V_(ref) (H) or V_(ref) (L) can be applied to the ECL circuit in the burn-in operation, it is possible to reduce the time required for the burn-in operation markedly.

Further, a modification of the first embodiment is shown in FIGS. 3A and 3B, respectively. In this modification, the pad 2 is connected to a junction point between the load resistor R and the constant current source 4, and this pad 2 is opened in the ordinary operation. Further, in the burn-in operation, the input voltage V_(IN) is set to V_(ref) (H)+Φ or V_(ref) (L)+Φ in the case of the device shown in FIG. 3A and to V_(ref) (H) or V_(ref) (L) in the case of the device shown in FIG. 3B.

In the above-mentioned modification, it is possible to obtain the same effect as with the case of the first embodiment. Further according to the modifications as shown in FIGS. 3A and 3B, since the pad 2 is opened in the ordinary operation, there in no need for connection of the pad 2 after sealing the ECL circuit into a package, so that it is possible to decrease the number of terminal pins provided to package and also production costs.

Further, when the above-mentioned modification is applied to the practical circuit, the node A of the circuit shown in FIG. 15 is connected to the pad 2.

A second embodiment of the third aspect of the semiconductor device including a reference potential control circuit according to the present invention will be described hereinbelow with reference to FIGS. 4A and 4B and FIG. 5. The concept of the second embodiment is shown in FIGS. 4A and 4B, in which the intensity of the current I_(B) of the constant current source 4 of each of the reference potential generating circuits shown in FIGS. 14A and 14B is switched. Here, the current intensity is switched in combination of three pairs of npn bipolar transistors (Q2_(a), Q2_(b)), (Q3_(a), Q3_(b)) and (Q4_(a), Q4_(b)) and three constant current sources 4₁, 4₂ and 4₃. In FIG. 4A and 4B, two emmitters of the two transistors Q2_(a) and Q2_(b) are connected in common to the constant current source 4₁ ; two emitters of the two transistors Q3_(a) and Q3_(b) are connected in common to the constant current source 4₂ ; and two emitters of the two transistors Q4_(a) and Q4_(b) are connected in common to the constant current source 4₃, respectively. Further, collectors of the transistors Q2_(a), Q3_(a) and Q4_(a) are grounded in common, and collectors of the transistors Q2_(b), Q3_(b) and Q4_(b) are connected in common to one end of a load resistor R. On the other hand, the other end of the load resistor R is grounded. Further, an intermediate constant level potential V_(IM) between "H" level and "L" level is applied to bases of the transistors Q2_(a), Q3_(a) and Q4_(a), and potentials V₁, V₂ and V₃ are applied to bases of the transistors Q2_(b), Q3_(b) and Q4_(b), respectively. When one of the three potentials V₁, V₂ and V₃ is set to the "H" level and the remaining potentials are set to the "L" level, only the transistor having the base to which the "H" level potential is applied is turned on, so that current of the constant current source connected to the turned-on transistor flows through the load resistor R. For instance, when V₁ is set to the "H" level and V₂ and V₃ are set to the "L" level, only the transistor Q2_(b) of the transistors Q2_(b), Q3_(b) and Q4_(b) is turned on, so that the constant current I_(B) of the constant current source 4₁ flows through the load resistor R. Therefore, when the constant currents I_(B), I_(H) and I_(L) of the constant current sources 4₁, 4₂ and 4₃ are set to different appropriate values, respectively, it is possible to set the level of the reference potential V_(ref) to any desire levels to V_(IM), V_(ref) (H) and V_(ref) (L), respectively without changing the levels of the potentials V₁, V₂ and V₃.

FIG. 5 shows a practical reference potential control circuit, in which the concept shown in FIG. 4A is applied to the circuit shown in FIG. 15. In this circuit, each of the three constant current sources is a series circuit of a resistor and an npn transistor. For instance, the constant current source 4₁ is composed of a transistor Q_(a) and a resistor γ_(B) ; the constant current 4₂ is composed of a transistor Q_(b) and a resistor γ_(H) ; and the constant current source 4₃ is composed of a transistor Q_(c) and a resistor γ_(L), respectively. Here, the current levels of the three constant current sources 4₁, 4₂ and 4₃ can be adjusted by adjusting the resistance values γ_(B), γ_(H) and γ_(L) (further, the sizes of the transistors Q_(a), Q_(b) and Q_(c) are adjusted, where necessary).

As described above, it is possible to obtain the same effect as with the case of the first embodiment.

Further a modification of the second embodiment is shown in FIGS. 6A and 6B. In this modification, three pairs of the npn bipolar transistors (Q2_(a), Q2_(b)), (Q3_(a), Q3_(b)) and (Q4_(a), Q4_(b)) of the reference potential control circuit of the semiconductor device shown in FIG. 4A and 4B are replaced with three switches of three P-type MOS transistors T₁, T₂ and T₃. By switching the potentials V₁, V₂ and V₃ applied to the respective gates of the three MOS transistors T₁, T₂ and T₃, it is possible to obtain the same effect as the second embodiment. Further, in the above-mentioned modification, although the P-type MOS transistors are used, it is of course possible to uses N-type MOS transistors of analog switches in which P-type and N-type MOS transistors are connected in parallel to each other. Further, the MOS transistor switches can be connected to any branched current paths. For instance, the MOS transistor can be connected between the bipolar transistor of the constant current source and the resistor or between the resistor and a supply voltage V_(EE).

A third embodiment of the third aspect of the semiconductor device including a reference potential control circuit according to the present invention will be described hereinbelow with reference to FIGS. 7A and 7B and FIG. 8. The concept of the third embodiment is shown in FIGS. 7A and 7B, in which the intensity of the load resistance R of each of the reference potential generating circuits shown in FIGS. 14A and 14B is switched. Here, three P-type MOS transistors T₁, T₂ and T₃ are used as the switches. A series connected transistor T₁ and a load resistor R, a series-connected transistor T₂ and a load resistor R_(H), and a series-connected transistor T₃ and a load resistor R_(L) are connected in parallel to each other, and further connected in common to a constant current source 4. Current can be passed through only one of the above-mentioned three series-connected circuits, by adjusting potentials V₁, V₂ and V₃ applied to gates of the transistors T₁, T₂ and T₃, respectively and appropriately. For instance, when V₁ is set to V_(EE) and V₂ and V₃ are set to the GND level, only the transistor T₁ is turned on, so that current flows through the series-connected circuit composed of the transistor T₁ and the resistor R. Accordingly, it is possible to switch the reference potential V_(ref) to any desired levels of V_(IM), V_(ref) (H) and V_(ref) (L) respectively, by setting and values of the three resistors R, R_(H) and R_(L) appropriately.

FIG. 8 shows a practical reference potential control circuit, in which the concept shown in FIG. 7A is applied to the circuit shown in FIG. 15. In this circuit, in the same way as with the case of the device shown in FIG. 7A, it is possible to switch the potential at the node A by setting the potentials applied to the gate of the transistors or switches T₁, T₂ and T₃ appropriately, so that it is possible to switch the reference potentials V_(ref1) and V_(ref2) to any desired level.

In the case of the third embodiment, it is possible to obtained the same effect as the first embodiment.

Further, in the above-mentioned third embodiment, although the P-type MOS transistors are used as the switches, it is of course possible to use N-type MOS transistors or analog switches in which P-type and N-type MOS transistors are connected in parallel to each other. Further, these switches can be connected to any current paths. For instance, the switch can be connected between the resistance and the node A.

One embodiment of a fourth aspect of the semiconductor device including a circuit, such as an ECL circuit, and a reference potential control circuit which conducts the burn-in operation according to the present invention will be described hereinbelow with reference to FIG. 9. In this embodiment, the semiconductor device comprises shorting means for shorting the complementary output nodes of the differential switch stage of the gates of the ECL circuit in the burn-in operation, and switching means for switching the reference potential of the ECL circuit between the ordinary operation and the burn-in operation.

FIG. 9 shows an example of the shorting means. In FIG. 9, a source and a drain of a P-type MOS transistor T_(p) are connected between two complementary output nodes NZ and /NZ to be shorted, and a gate thereof is connected to a control line /BI. In the burn-in operation, the control line /BI is set to the "L" level to turn on the P-type MOS transistor T_(p), and in the ordinary operation, the control line /BI is set to the "H" level to turn off the P-type MOS transistor T_(p). By use of this method, it is possible to short the complementary output nodes only in the burn-in operation.

Further, the complementary output nodes can be shortened in the burn-in operation as follows: the complementary output nodes are previously shorted by use of a metal wire. After the burn-in operation, the metal wiring is cut off by use of a laser or removed away by a chemical process, and thereafter the metal wiring is reformed so as not to short the complementary output nodes.

Further, the switching means for switching the reference potential between the burn-in operation and the ordinary operation can be constructed in the same way as with the case of the embodiments of the third aspect of the present invention.

In this fourth aspect of the present invention, it is possible to pass current through all the current paths of the ECL circuit without using any test patterns, by first shorting the complementary output nodes of the differential switch stage of all the gates of the ECL circuit by use of the shorting means and thereafter by switching the reference potential of the ECL circuit to any desired levels by use of the switching means. Therefore, it is possible to shorten the time required for the burn-in operation markedly, eliminate the test patterns, enable the burn-in operation to some extent on the wafer, and eliminate the use of the expensive pulse generators for inputting the test patterns.

FIG. 24 shows a circuit configuration in which a large number of ECL circuits shown in FIG. 16 or FIG. 18 are arranged on a semiconductor substrate 100. A reference potential generation circuit VG supplies each of the ECL circuits with one or three reference potentials (V_(ref1), V_(ref2) and V_(ref3)). Accordingly, it is possible to simultaneously conduct the burn-in operation to all the ECL circuits on the semiconductor substrate 100 by controlling the reference potential(s) generated by the potential generation circuit VG as described in the above respective embodiments.

The embodiments have been described in such a way that the present invention is applied to ECL circuits. Further, the present invention can be applied to a circuit including semiconductor devices, such as MOSFET, which functions like the ECL circuit.

As described above, it is possible to shorten the time for required for the burn-in operation markedly.

Especially, in the case where a large number of ECL circuits are arranged on a semiconductor substrate, extensive and bulky test patterns must be inputted tho those ECL circuits via a large number of input terminals in the conventional method. Further, in the conventional method, there are ECL circuits through which currents rarely flow when ELC circuits are complicatedly connected together, there exists a problem in that the test time required for the burn-in operation is too long.

Contrary to this, it is possible to conduct the burn-in operation only by controlling reference potentials supplied to ECL circuits according to the present invention. Therefore, test patterns of a small number of steps are available and the burn-in operation can be conducted to a large number of ECL circuits, so that the time for required for the burn-in operation can be shortened markedly.

Further, since test patterns of a small number of steps are available, it is possible to conduct the burn-in operation in a stage of tests where ECL circuits are arranged on a wafer before packaged. Therefore, expensive packages will not be wasted and further burn-in boards and expensive pulse generator are not required for the operation. 

What is claimed is:
 1. A semiconductor device, comprising: compare means for comparing an input signal potential having a level that is less than a maximum level and greater than a minimum level with a reference potential which is set to an intermediate level between the maximum level and the minimum level to output an output signal according to the comparison result in an ordinary operation, andswitching means for switching the reference potential level from the intermediate level set during the ordinary operation to a level higher than the maximum level and then to another level lower than the minimum level during a burn-in operation.
 2. A semiconductor device according to claim 1, wherein the different level set during the burn-in operation for the reference potential level is one of a level greater than the maximum level of the input signal potential and a level less than the minimum level of the input signal potential.
 3. A semiconductor device according to claim 1, wherein the reference potential level set during the burn-in operation is a plurality of reference potentials, including at least a first reference potential that is set to a level greater than the maximum level of the input signal potential, and a second reference potential that is set to a level less than the minimum level of the input signal potential.
 4. A semiconductor device, comprising:comparing means for comparing an input signal potential having a level that is less than a maximum level and greater than a minimum level with a reference potential which is set to a first intermediate level between the maximum level and the minimum level, and for outputting an output signal according to the comparison result in an ordinary operation, setting means for setting the input signal potential during a burn-in operation to a second intermediate level half-way between the maximum level and the minimum level of the input signal potential, and switching means for switching the reference potential level from the first intermediate level set during the ordinary operation to a level higher than the second intermediate level and then to another level lower than the second intermediate level during the burn-in operation.
 5. The semiconductor device according to claim 4, wherein the device further comprises a plurality of signal output circuits connected together, each of which has a differential circuit, the signal output circuit comparing an input signal applied to the differential circuit with the reference potential to output an output signal according to the comparison result and the setting means sets the input signal potential, to be applied to a post-stage signal output circuit, to the second intermediate level by shorting complementary output nodes of the differential circuit.
 6. A semiconductor device according to claim 4, wherein said device is an emitter-coupled logic (ECL) circuit which includes a differential switch stage having complementary output nodes, said device further comprising shorting means for shorting the complementary output nodes during the burn-in operation only.
 7. A semiconductor device, comprising:compare means for comparing, as a first comparison result, a first input signal potential having a first level that is less than a first maximum level and greater than a first minimum level with a first reference potential which is set to a first intermediate level between the first maximum level and the first minimum level to output a first output signal according to the first comparison result in an ordinary operation, and for comparing, as a second comparison result, a second input signal potential having a second level that is less than a second maximum level and greater than a second minimum level with a second reference potential which is set to a second intermediate level between the second maximum level and the second minimum level to output a second output signal according to the second comparison result in the ordinary operation; and switching means for switching the first reference potential level from the first intermediate level set during the ordinary operation to a level higher than the first maximum level and then to another level lower than the first minimum level during a burn-in operation, and for switching the second reference potential level from the second intermediate level set during the ordinary operation to still another level higher than the second maximum level and then to a still further level lower than the second minimum level during the burn-in operation. 